Precise alignment of wafer sample face to the polishing plate
Precise control of loading pressure for optimum results
The jigs provide the means to achieve sample parallelism down to a few seconds of arc (when used with the 6183.1 Autocollimator)
They can hold 2 inch, 3 inch or 4 inch wafers or samples (6 inch capability also available for special applications)
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They incorporate a 'hard stop' to prevent additional material removal after the process end-point.
ULTRA TEC Precision Jigs are fully sealed to prevent abrasives jamming any moving parts during or between processes
The jigs are chemically resistant and capable of polishing with all techniques
Vacuum fixtures are available for 'no-cement' mounting
Ordering Information:
| Part No. | Description |
| 6166.2 | 2 inch Precision Jig, with 'in-situ' micron precision sample removal indicator (d.i.) |
| 6165.2 | 2 inch Precision Jig |
| 6166.3 | 3 inch Precision Jig with digital indicator. |
| 6165.3 | 3 inch Precision Jig |
| 6166.4 | 4 inch Precision Jig |
| 6184.1 | Sample Loading Gauge |
| 6183.1 | Autocollimator |
| 6245.1 | Precision Micromount (with digital indicator) |
